VTPMML
UNIVERSITY OF LATVIA
Laboratory for Mathematical Modelling
of Environmental and Technological Processes

A. Sabanskis, J. Virbulis

Modelling of Thermal Field and Point Defect Dynamics During Silicon Single Crystal Growth Using CZ Technique


Abstract

Mathematical modelling is employed to numerically analyse the dynamics of the Czochralski (CZ) silicon single crystal growth. The model is axisymmetric, its thermal part describes heat transfer by conduction and thermal radiation, and allows to predict the timedependent shape of the crystal-melt interface. Besides the thermal field, the point defect dynamics is modelled using the finite element method. The considered process consists of cone growth and cylindrical phases, including a short period of a reduced crystal pull rate, and a power jump to avoid large diameter changes. The influence of the thermal stresses on the point defects is also investigated.

Full paper



Proceedings of the VIII International Scientific Colloquim "Modelling for Materials Processing", Riga, Latvia, (2017), pp. 51-56.

https://doi.org/10.22364/mmp2017.7